Template effects on low k materials made from spin-on mesoporous silica
- Author(s):
- Publication title:
- Nanotechnology in mesostructured materials : proceedings of the 3rd International Mesostructured Materials Symposium, Jeju, Korea, July 8-11, 2002
- Title of ser.:
- Studies in surface science and catalysis
- Ser. no.:
- 146
- Pub. Year:
- 2003
- Page(from):
- 391
- Page(to):
- 394
- Pages:
- 4
- Pub. info.:
- Amsterdam: Elsevier
- ISSN:
- 01672991
- ISBN:
- 9780444514349 [0444514341]
- Language:
- English
- Call no.:
- S76950
- Type:
- Conference Proceedings
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