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Noise in piezoresistive Si pressure sensors (Invited Paper)

Author(s):
  • Szentpali, B. ( Research Institute for Technical Physics and Materials Science (Hungary) )
  • Adam, M. ( Research Institute for Technical Physics and Materials Science (Hungary) )
  • Mohacsy, T. ( Research Institute for Technical Physics and Materials Science (Hungary) )
Publication title:
Noise and Information in Nanoelectronics, Sensors, and Standards III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5846
Pub. Year:
2005
Page(from):
169
Page(to):
179
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458414 [0819458414]
Language:
English
Call no.:
P63600/5846
Type:
Conference Proceedings

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