Laser irradiation, ion implantation, and e-beam writing of integrated optical structures

Laser irradiation, ion implantation, and e-beam writing of integrated optical structures

Author(s):

Righini, G. C. ( Nello Carrara Institute of Applied Physics, CNR (Italy) )

Banyasz, I. ( Institute of Solid State Physics and Optics (Hungary) )

Berneschi, S. ( Nello Carrara Institute of Applied Physics, CNR (Italy) )

Brenci, M. ( Nello Carrara Institute of Applied Physics, CNR (Italy) )

Chiasera, A. ( Institute of Photonics and Nanotechnologies, CNR (Italy) )

Cremona, M. ( PUC-Rio (Brazil) )

Ehrt, D. ( Friedrich-Schiller-Univ. Jena (Germany) )

Ferrari, M. ( Institute of Photonics and Nanotechnologies, CNR (Italy) )

Montereali, R. M. ( ENEA (Italy) )

Nunzi Conti, G. ( Nello Carrara Institute of Applied Physics, CNR (Italy) )

Pelli, S. ( Nello Carrara Institute of Applied Physics, CNR (Italy) )

Sebastiani, S. ( Nello Carrara Institute of Applied Physics, CNR (Italy) )

Tosello, C. ( Univ. of Trento (Italy) )

8 more

Publication title:

Photonic Materials, Devices, and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5840

Pub. Year:

2005

Page(from):

649

Page(to):

657

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458353 [081945835X]

Language:

English

Call no.:

P63600/5840-2

Type:

Conference Proceedings

Details

TDL ID:	ZA00015074
Series ID:	PA00000029
Conf. info. (Name):	SPIE Microtechnologies : Photonic Materials, Devices, and Applications
Conf. info. (Number):	2005
Conf. info. (Venue):	Seville, Spain
Conf. info. (Date):	2005.05.09-2005.05.11

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