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Grating enhanced MOEMS: a novel class of beam steering devices

Author(s):
Publication title:
Photonic Materials, Devices, and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5840
Pub. date:
2005
Page(from):
336
Page(to):
344
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458353 [081945835X]
Language:
English
Call no.:
P63600/5840-1
Type:
Conference Proceedings

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