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Micromachined IR-source with excellent blackbody like behaviour (Invited Paper)

Author(s):
Konz, W. ( Fraunhofer Institute for Physical Measurement Techniques (Germany) )
Hildenbrand, J. ( Fraunhofer Institute for Physical Measurement Techniques (Germany) )
Bauersfeld, M. ( Fraunhofer Institute for Physical Measurement Techniques (Germany) )
Hartwig, S. ( Fraunhofer Institute for Physical Measurement Techniques (Germany) )
Lambrecht, A. ( Fraunhofer Institute for Physical Measurement Techniques (Germany) )
Lehmann, V. ( Infineon Technologies AG (Germany) )
Wollenstein, J. ( Fraunhofer Institute for Physical Measurement Techniques (Germany) )
2 more
Publication title:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5836
Pub. Year:
2005
Page(from):
540
Page(to):
548
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458315 [0819458317]
Language:
English
Call no.:
P63600/5836
Type:
Conference Proceedings

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