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Model building, control design, and practical implementation of a high precision high dynamical MEMS acceleration sensor (Invited Paper)

Author(s):
Wolfram, H. ( Chemnitz Univ. of Technology (Germany) )
Schmiedel, R. ( Chemnitz Univ. of Technology (Germany) )
Hiller, K. ( Chemnitz Univ. of Technology (Germany) )
Aurich, T. ( Gesellschaft fur Mikroelektronikanwendungen Chemnitz m.b.H. (Germany) )
Gunther, W. ( Gesellschaft fur Mikroelektronikanwendungen Chemnitz m.b.H. (Germany) )
Kurth, S. ( Fraunhofer Institute for Reliability and Microintegration (Germany) )
Mehner, J. ( Fraunhofer Institute for Reliability and Microintegration (Germany) )
Dotzel, W. ( Chemnitz Univ. of Technology (Germany) )
GeBner, T. ( Chemnitz Univ. of Technology (Germany) and Fraunhofer Institute for Reliability and Microintegration (Germany) )
4 more
Publication title:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5836
Pub. Year:
2005
Page(from):
326
Page(to):
340
Pages:
15
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458315 [0819458317]
Language:
English
Call no.:
P63600/5836
Type:
Conference Proceedings

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