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Suspended-gate thin film transistor as highly sensitive humidity sensor

Author(s):
Salaun, A.-C. ( Univ. Rennes I (France) )
Kotb, H. M. ( Univ. Rennes I (France) )
Mohammed-Brahim, T. ( Univ. Rennes I (France) )
Bihan, F. Le. ( Univ. Rennes I (France) )
Lhermite, H. ( Univ. Rennes I (France) )
Bendriaa, F. ( Univ. Rennes I (France) )
1 more
Publication title:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5836
Pub. Year:
2005
Page(from):
231
Page(to):
238
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458315 [0819458317]
Language:
English
Call no.:
P63600/5836
Type:
Conference Proceedings

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