Blank Cover Image

An integrated self-masking technique for providing low-loss metallized RF MEMS devices in a polysilicon only MEMS process (Invited Paper)

Author(s):
Publication title:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5836
Pub. Year:
2005
Page(from):
138
Page(to):
152
Pages:
15
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458315 [0819458317]
Language:
English
Call no.:
P63600/5836
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Design of rotating MEMS tunable capacitors for use at rf and microwave frequencies

Wilson, J.M., Bashirullah, R., Nackashi, D.P., Winick, D.A., Duewer, B.E., Franzon, P.D.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Providing technology infrastructure for MEMS

Ribas,R.P., Veychard,D., Karam,J.M., Courtois,B.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings Programmable MEMS capacitor arrays

Duewer,B.E., Wilson,J.M., Winick,D.A., Franzon,P.D.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings New techniques for laser micromachining MEMS devices (Invited Paper)

Abbott, C., Allott, R.M., Bann, B., Boehlen, K.L., Gower, M.C., Rumsby, P.T., Stassen Boehlen, I., Sykes, N.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Polysilicon for everything? (Invited Paper)

Ward,M.C.L., McNie,M.E., Bunyan,R.J.T., King,D.O., Carline,R.T., Wilson,R., Gillham,J.P.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Fabrication challenges for next-generation devices: MEMS for rf wireless communications (Invited Paper)

Seeger, D.E., Lund, J., Jahnes, C., Deligianni, L., Buchwalter, P., Andricacos, P.C., Acosta, R.E., Babich, I.V., …

SPIE-The International Society for Optical Engineering
4 Conference Proceedings MEMS-based diffractive optical-beam-steering technology

Winick,D.A., Duewer,B., Chaudhury,S., Wilson,J., Tucker,J., Eksi,U., Franzon,P.D.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Molectronics: a circuit design perspective

Nackashi,D.P., Franzon,P.D.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Improving interconnect characteristics of thin film MEMS processes

Duewer, B.E., Winick, D.A., Oberhofer, A.E., Muth, J., Franzon, P.D.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Design and fabrication of low-loss RF MEMS switches for a broadband reflectarray

Ziaei, A., Dean, T., Charrier, M., Bondavalli, P., Polizzi, J.-P., Legay, H., Pinte, B., Girard, E., Gillard, R.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Optical MEMS devices for telecom systems (Invited Paper)

Pardo, F., Aksyuk, V.A., Arney, S., Bair, H., Basavanhally, N.R., Bishop, D.J., Bogart, G.R., Bolle, C.A., Bower, J.E., …

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Recent advances in optical MEMS devices and systems (Invited Paper)

Patterson, P.R., Hah, D., Lee, M.M.C., Tsai, J.C., Wu, M.C.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12