Polymeric helices with submicron dimensions for MEMS devices (Invited Paper)

Polymeric helices with submicron dimensions for MEMS devices (Invited Paper)

Author(s):

Elias, A. L. ( Univ. of Alberta (Canada) )
Harris, K. D. ( Eindhoven Univ. of Technology (Netherlands) )
Bastiaansen, C. W. M. ( Eindhoven Univ. of Technology (Netherlands) )
Broer, D. J. ( Eindhoven Univ. of Technology (Netherlands) and Philips Research Labs. (Netherlands) )
Brett, M. J. ( Univ. of Alberta (Canada) )

Publication title:

Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5836

Pub. Year:

2005

Page(from):

41

Page(to):

55

Pages:

15

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458315 [0819458317]

Language:

English

Call no.:

P63600/5836

Type:

Conference Proceedings

Details

TDL ID:	ZA00015068
Series ID:	PA00000029
Conf. info. (Name):	Microtechnologies for the New Millennium : Smart Sensors, Actuators, and Mems
Conf. info. (Number):	2005 : 2nd
Conf. info. (Venue):	Seville, Spain
Conf. info. (Date):	2005.05.09-2005.05.11

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