Application of PGSD (proximity gap suction development) to 70 nm NAND mask fabrication

Application of PGSD (proximity gap suction development) to 70 nm NAND mask fabrication

Author(s):

Sakurai, H. ( Toshiba Corp. (Japan) )

Shibata, T. ( Toshiba Corp. (Japan) )

Itoh, M. ( Toshiba Corp. (Japan) )

Ooishi, K. ( Tokyo Electron Kyushu Ltd. (Japan) )

Funakoshi, H. ( Tokyo Electron Kyushu Ltd. (Japan) )

Okamoto, Y. ( Tokyo Electron Kyushu Ltd. (Japan) )

Oono, S. ( Tokyo Electron Kyushu Ltd. (Japan) )

Kaneda, M. ( Tokyo Electron Kyushu Ltd. (Japan) )

Kamei, S. ( Tokyo Electron Kyushu Ltd. (Japan) )

Hayashi, N. ( Dai Nippon Printing Co., Ltd. (Japan) )

5 more

Publication title:

EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5835

Pub. Year:

2005

Page(from):

29

Page(to):

36

Pages:

8

Pub. info.:

Bellingham, Wash.,: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458308 [0819458309]

Language:

English

Call no.:

P63600/5835

Type:

Conference Proceedings

Details

TDL ID:	ZA00015067
Series ID:	PA00000029
Conf. info. (Name):	EMLC : European Mask and Lithography Conference
Conf. info. (Number):	2005 : 21st
Conf. info. (Venue):	Dresden, Germany
Conf. info. (Date):	2005.01.31-2005.02.03

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