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EUV laser produced plasma source development for lithography (Invited Paper)

Author(s):
Hayden, P. ( Univ. College Dublin (Ireland) )
Sheridan, P. ( Univ. College Dublin (Ireland) )
O'Sullivan, G. ( Univ. College Dublin (Ireland) )
Dunne, P. ( Univ. College Dublin (Ireland) )
Gaynor, L. ( Univ. College Dublin (Ireland) )
Murphy, N. ( Univ. College Dublin (Ireland) )
Cummings, A. ( Univ. College Dublin (Ireland) )
2 more
Publication title:
Opto-Ireland 2005: Optical Sensing and Spectroscopy
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5826
Pub. date:
2005
Page(from):
154
Page(to):
164
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458117 [0819458112]
Language:
English
Call no.:
P63600/5826
Type:
Conference Proceedings

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