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Optically addressed MEMS driven with high-frequency modulated light

Author(s):
Publication title:
Optical Pattern Recognition XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5816
Pub. date:
2005
Page(from):
144
Page(to):
151
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458018 [0819458015]
Language:
English
Call no.:
P63600/5816
Type:
Conference Proceedings

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