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Determination of mechanical properties of silicon nitride thin films using nanoindentation

Author(s):
Martyniuk, M. ( The Univ. of Western Australia (Australia) )
Antoszewski, J. ( The Univ. of Western Australia (Australia) )
Walmsley, B. A. ( The Univ. of Western Australia (Australia) )
Musca, C. A. ( The Univ. of Western Australia (Australia) )
Dell, J. M. ( The Univ. of Western Australia (Australia) )
Jung, Y.　-G. ( National Institute of Standards and Technology (USA) )
Lawn, B. R. ( National Institute of Standards and Technology (USA) )
Huang, H. ( The Univ. of Western Australia (Australia) )
Faraone, L. ( The Univ. of Western Australia (Australia) )
4 more
Publication title:
Spaceborne sensors II : 28-29 March 2005, Orlando, Florida, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5798
Pub. Year:
2005
Page(from):
216
Page(to):
225
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457837 [0819457833]
Language:
English
Call no.:
P63600/5798
Type:
Conference Proceedings

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