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Research for polyimide as a sacriticial layer in MEMS device

Author(s):
  • Hu, M. ( East China Normal Univ. (China) )
  • Chen, J. ( East China Normal Univ. (China) )
  • Lai, Z. ( East China Normal Univ. (China) )
  • Mao, H. ( East China Normal Univ. (China) )
  • Sheng, D. ( East China Normal Univ. (China) )
Publication title:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5774
Pub. Year:
2004
Page(from):
642
Page(to):
645
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
Language:
English
Call no.:
P63600/5774
Type:
Conference Proceedings

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