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Index-compatible design of multilayer film for MEMS-type variable optical attenuator

Author(s):
  • Peng, D. ( East China Normal Univ. (China) )
  • Li, G. ( East China Normal Univ. (China) )
  • Wang, L. ( East China Normal Univ. (China) )
  • Lai, Z. ( East China Normal Univ. (China) )
Publication title:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5774
Pub. Year:
2004
Page(from):
603
Page(to):
606
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
Language:
English
Call no.:
P63600/5774
Type:
Conference Proceedings

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