Study on DC-contact MEMS switches

Study on DC-contact MEMS switches

Author(s):

Chen, J. J. ( East China Normal Univ. (China) )
Wei, H. Z. ( East China Normal Univ. (China) )
Hu, M. L. ( East China Normal Univ. (China) )
Lai, Z. S. ( East China Normal Univ. (China) )

Publication title:

Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5774

Pub. Year:

2004

Page(from):

591

Page(to):

594

Pages:

4

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457554 [0819457558]

Language:

English

Call no.:

P63600/5774

Type:

Conference Proceedings

Details

TDL ID:	ZA00015002
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Thin Film Physics and Applications
Conf. info. (Number):	2004 : 5th
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2004.05.31-2004.06.02

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