Transfer bonding of thick silicon nitride film via split of porous silicon

Transfer bonding of thick silicon nitride film via split of porous silicon

Author(s):

Bao, X. Q. ( East China Normal Univ. (China) )

Ding, Y. F. ( East China Normal Univ. (China) )

Chen, Y. ( East China Normal Univ. (China) )

Guo, P. S. ( East China Normal Univ. (China) )

Shi, Y. L. ( East China Normal Univ. (China) )

Wang, L. W. ( East China Normal Univ. (China) )

Lai, Z. S. ( East China Normal Univ. (China) )

2 more

Publication title:

Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5774

Pub. Year:

2004

Page(from):

579

Page(to):

582

Pages:

4

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457554 [0819457558]

Language:

English

Call no.:

P63600/5774

Type:

Conference Proceedings

Details

TDL ID:	ZA00015002
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Thin Film Physics and Applications
Conf. info. (Number):	2004 : 5th
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2004.05.31-2004.06.02

Similar Items:

1 Conference Proceedings Bond enhance of hydroxyapatite/silicon layers by introducing a porous silicon interlayer Chen, S., Zhu, J., Zhang, J., Feng, X., Shi, Y., Wang, X., Luo, L., Zhu, Z. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Diamond film: a promising passivation film of porous silicon Shi,W., Wang,L., Xia,Y., Ju,J., Fang,Z., Mo,Y. SPIE-The International Society for Optical Engineering
2 Conference Proceedings MgB2 Thick Film Grown on Silicon Carbide Substrate by Hybrid Physical-Chemical Vapor Deposition F. Li, T. Guo, K.C. Zhang, L.P. Chen, C.P. Chen, Q.R. Feng Trans Tech Publications	8 Conference Proceedings MgB2 thick film grown on stainless steel substrate with ductility Feng, Q., Chen, C., Lu, Y., Jia, Z., Guo, J., Wang, X., Zhu, M., Xu, J., Wang, Y. SPIE - The International Society of Optical Engineering
3 Conference Proceedings BLUE LIGHT EMISSION FROM POROUS SILICON Hou, X.Y., Shi, G., Wang, W., Zhang, F.L., Hao, P.H., Huang, D.M., Jin, X.F., Wang, Xun Materials Research Society	9 Conference Proceedings Tunable optical splitter technology Xiao, S.L., Zeng, Q.J., Wang, J.X., Zhao, H.D., Chi, H., Wang, Y., Liu, F.Q., Zhu, X. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Silicon Carbon Nitride Films Deposited by ECR CVD Chen, K-H., Wu, J.-J., Wen, C.-Y., Chen, L-C., Fan, C.-W, Kuo, P.-F., Chen, Y.-F., Huang, Y.-S. Electrochemical Society	10 Conference Proceedings Electrical Properties of Tantalum Oxide Films on Plasma Nitrided Silicon Substrates Lai, Y.-S., Chen, J.-S Electrochemical Society
5 Conference Proceedings Effects of Annealing on the Structure and Photoluminescence of Amorphous SiC:Tb Films Deposited on Porous Silicon Xu, D. Y., Liu, Y. P., Chen, Z. Y., He, Z. W., Liu, X. Q., Wang, Y. Y. Trans Tech Publications	11 Conference Proceedings Silicon-oxynitride films prepared for 157-nm attenuated phase-shifting masks Chen,H.L., Wang,L.A., Yeh,L.S., Lai,F.D. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Silicon Nitride/Boron Nitride Composite by Combustion Synthesis K. Zhang, Q. Zhang, P.F. Wang, L. Bai, W.P. Shen, C.C. Ge Trans Tech Publications	12 Conference Proceedings Study on Hole Making in EACVD Thick Diamond Film Zuo, D. W., Lu, W. Z., Li, X. F., Chu, X. Q., Wang, M. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12