Influence of experimental environment on the process of photo-assisted electrochemical etching process on silicon

Influence of experimental environment on the process of photo-assisted electrochemical etching process on silicon

Author(s):

Chen, Y. ( East China Normal Univ. (China) )
Guo, P. ( East China Normal Univ. (China) )
Wang, L. ( East China Normal Univ. (China) and Shanghai Institute of Technical Physics, CAS (China) )

Publication title:

Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5774

Pub. Year:

2004

Page(from):

575

Page(to):

578

Pages:

4

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457554 [0819457558]

Language:

English

Call no.:

P63600/5774

Type:

Conference Proceedings

Details

TDL ID:	ZA00015002
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Thin Film Physics and Applications
Conf. info. (Number):	2004 : 5th
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2004.05.31-2004.06.02

Similar Items:

1 Conference Proceedings Experimental Research and Analysis on Micro Electrode Fabricated by Electrochemical Etching H.B. Wang, Z.N. Guo, Z.P. Han Trans Tech Publications	7 Conference Proceedings OPTIMIZATION OF Jc FOR PHOTO-ASSISTED MOCVD PREPARED YBCO THIN FILMS BY ROBUST DESIGN Chou, P. C., Zhong, Q., Li, Q. L., Ignatiev, A., Wang, C. Y., Deal, E. E., Chen, J. G. MRS - Materials Research Society
2 Conference Proceedings Laser Assisted Electrochemical Etching of Silicon - Simulations and Experiment Juhasz, R., Kieimann, P., Linnros, J. Electrochemical Society	8 Conference Proceedings Transfer bonding of thick silicon nitride film via split of porous silicon Bao, X. Q., Ding, Y. F., Chen, Y., Guo, P. S., Shi, Y. L., Wang, L. W., Lai, Z. S. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Investigation of nanostructure on silicon by electrochemical etching L. Xu, J. You, L. Wang Society of Photo-optical Instrumentation Engineers	9 Conference Proceedings Influence of the Weld Heat Input on the Electrochemical Behavior of the 921A High Strength Steel Welding Joints K. Wang, J.L. Yi, S.D. Zheng, C.F. Guo, H.X. Chen Trans Tech Publications
4 Conference Proceedings Improvement of relief depths and diffraction efficiencies of micro-optical elements fabricated in photo-etching cellulose film by post-processing techniques Zhu, J.H., Xia, C.Q., Wang, K.T., Guo, L.R. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Laser-Assisted Wes Etching of Silicon Lim, P., Brock, J.R., Trachtenberg, I. American Institute of Chemical Engineers
5 Conference Proceedings Visible Luminescence of Nanoporous Silicon Using Alternating Current Photo-Assisted Electrochemical Etching for Potential MSM Photodetector A. Mahmood, Z. Hassan, N.M. Ahmed, E. Shahiri, A.F. Abd Rahim Trans Tech Publications	11 Conference Proceedings Self-Limited Photo-Assisted Synthesis of Silicon Nanocrystals Chen, C. Y., Kimura, S., Sen, S., Nozaki, S., Ono, H., Uchida, K., Morisaki, H. Materials Research Society
6 Conference Proceedings Size Reduction of Silicon Nanopillars by Photo-Electrochemical Etching Juhasz, Robert, Linnros, Jan, Kleimann, Pascal Materials Research Society	12 Conference Proceedings Fabrication of wall array by electrochemical etching of n-type silicon Z. Zhao, C. Bai, J. Guo, H. Niu Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12