Blank Cover Image

High-isolation contact switch in MEMS phase shifter

Author(s):
Li, W. ( East China Normal Univ. (China) )
Shi, Y. ( East China Normal Univ. (China) )
Qing, J. ( East China Normal Univ. (China) )
Jiang, L. ( East China Normal Univ. (China) )
Ren, Z. ( East China Normal Univ. (China) )
Xin, P. ( East China Normal Univ. (China) )
Zhu, Z. ( East China Normal Univ. (China) )
Lai, Z. ( East China Normal Univ. (China) )
3 more
Publication title:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5774
Pub. date:
2004
Page(from):
547
Page(to):
550
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
Language:
English
Call no.:
P63600/5774
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application

Jiang, L., Shi, Y., Li, W., Ding, Y., Lai, Z., Zhu, Z.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Improved microwave performance on low-resistivity Si substrates by introducing an oxidized porous Si interlayer

Zhu,Z., Shi,Y., Long,Y., Xin,P., Lai,Z.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Failure analysis of MEMS RF cantilevered beam switch

Guo, F., Xu, X., Li, C., Ge, Y., Yu, J., Xin, P., Zhu, R., Lai, Z., Zhu, Z., Lu, W.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings A study on high isolation RF MEMS switch [6032-26]

Lin, L., Hu, G., Lin, Z., Liu, W.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Study on DC-contact MEMS switches

Chen, J. J., Wei, H. Z., Hu, M. L., Lai, Z. S.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Influence of Service Time on the Microstructure and High Temperature Mechanical Properties of T23 Boiler Tube

C. He, B.L. Shi, W.S. Li, J.P. Zhao, K. Xu, Y. Liu, A. Ren, Y. Li

Trans Tech Publications
4 Conference Proceedings Design and fabrication of micromachined microwave transmission lines

Shi,Y., Lai,Z., Xin,P., Shao,L., Zhu,Z.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings A Study of Chaotic Motion on Nonlinear Vibration-Isolation System

Ouyang Qing, Shi-Jian Zhu, Yin Shi

American Society of Mechanical Engineers
5 Conference Proceedings Coupled analysis on the micro-airflow and its actuator for MEMS fluidic devices

L. Li, R. Zhu, Z. Zhou, J. Ren

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Stress relaxation of the micromachined coplanar waveguide

Shi,Y., Lai,Z., Xin,P.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings A four-bit digital MEMS phase shifter

Zhu, J., Zhou, B., Lin, J., Yu, Y., Lu, L.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Design of 200-nm,170-nm,and 140-nm DUV contact sweeper high-transmission attenuating phase-shift mask:?.Experimental results

Socha,R.J., Shi,X., Holman,K.C., Dusa,M.V., Conley,W., Petersen,J.S., Chen,J.F., Laidig,T.L., Wampler,K.E., …

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12