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Low-loss microwave coplanar waveguides realized on low-resistivity silicon wafer

Author(s):
Ge, Y. ( East China Normal Univ. (China) )
Guo, F. ( East China Normal Univ. (China) and Shanghai Institute of Technical Physics, CAS (China) )
Wang, W. ( East China Normal Univ. (China) )
Yu, S. ( East China Normal Univ. (China) )
Shao, L. ( East China Normal Univ. (China) )
Zhu, Z. ( East China Normal Univ. (China) )
Lu, W. ( Shanghai Institute of Technical Physics. CAS (China) )
2 more
Publication title:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5774
Pub. Year:
2004
Page(from):
515
Page(to):
518
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
Language:
English
Call no.:
P63600/5774
Type:
Conference Proceedings

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