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Deposition of microcrystalline silicon thin films for solar cells by VHF-PECVD

Author(s):
Zhang, X. ( Nankai Univ. (China) )
Zhao, Y. ( Nankai Univ. (China) )
Zhu, F. ( Nankai Univ. (China) )
Mai, Y. ( Nankai Univ. (China) )
Wei, C. ( Nankai Univ. (China) )
Gao, Y. ( Nankai Univ. (China) )
Hou, G. ( Nankai Univ. (China) )
Sun, J. ( Nankai Univ. (China) )
Li, J. ( Nankai Univ. (China) )
Geng, X. ( Nankai Univ. (China) )
Xiong, S. ( Nankai Univ. (China) )
6 more
Publication title:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5774
Pub. Year:
2004
Page(from):
426
Page(to):
429
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
Language:
English
Call no.:
P63600/5774
Type:
Conference Proceedings

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