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Liquid nitrogen flowrate alarm system for MBE

Author(s):
  • Sun, Y. ( Semiconductor institute, CAS (China) )
  • Li, S. ( Semiconductor institute, CAS (China) )
  • Ni, H. ( Semiconductor institute, CAS (China) )
  • Xu, Y. ( Semiconductor institute, CAS (China) )
  • Chen, L. ( Semiconductor institute, CAS (China) )
Publication title:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5774
Pub. Year:
2004
Page(from):
423
Page(to):
425
Pages:
3
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
Language:
English
Call no.:
P63600/5774
Type:
Conference Proceedings

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