Blank Cover Image

Fabrication of SiGe-on-insulator and applications for strained Si (Invited Paper)

Author(s):
  • Lin, C. ( Shanghai Institute of Microsystem and Information Technology. CAS (China) )
  • Liu, W. ( Shanghai Institute of Microsystem and Information Technology. CAS (China) )
  • An, Z. ( Shanghai Institute of Microsystem and Information Technology. CAS (China) )
  • Di, Z. ( Shanghai Institute of Microsystem and Information Technology. CAS (China) )
  • Zhang, M. ( Shanghai Institute of Microsystem and Information Technology. CAS (China) )
Publication title:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5774
Pub. Year:
2004
Page(from):
136
Page(to):
141
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
Language:
English
Call no.:
P63600/5774
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Strained Silicon-On-Insulator - Fabrication and Characterization

M. Reiche, C. Himcinschi, U. Gösele, S. Christiansen, S. Mantl, D. Buca, Q. Zhao, S. Feste, R. Loo, D. Nguyen, W. …

Electrochemical Society
7 Conference Proceedings Silica waveguide devices and their applications (Invited Paper)

Sun, C.J., Schmidt, K.M., Lin, W.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Strained- Si/SiGe/Si heterostructures : Nanos cale structural, chemical and electrical characterization (invited paper)

Rozgonyi, G., Lu, J., Zhao, W., Zhang, R., Chaumont, M.

Electrochemical Society
8 Conference Proceedings Relaxed SiGe-on-insulator substrates through implanting oxygen into pseudomorphic SiGe/Si heterostructure

Zbang, M., An, Z., Wu, Y., Di, Z., Chu, P., Lin, C.

Electrochemical Society
3 Conference Proceedings Strained-Si-on-Insulator (SSOI) and SiGe-on-Insulator (SGOI): Fabrication Obstacles and Solutions

Taraschi, Gianni, Pitera, Arthur J., McGill, Lisa M., Cheng, Zhi-Yuan, Lee, Minjoo L., Langdo, Thomas A., Fitzgerald, …

Materials Research Society
9 Conference Proceedings MOS Si/Ge photodetectors (Invited Paper) [6368-06]

Lin, C. -H., Liu, C. W.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Fabrication and Characterization of a Germanium Quantum-Dot Transistor Formed by Selective Oxidation of SiGe/Si-on-Insulator

Liao, W.M., Lin, S.W., Tseng, S.S., Lin, C.K., Kuo, M.T., Li, P.W.

Materials Research Society
10 Conference Proceedings Liquid crystal applications in optical telecommunication (Invited Paper)

Mao, C., Xu, M., Feng, W., Huang, T., Wu, K., Liu, J.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Comparison of SiGe Virtual Substrates for the Fabrication of Strained Silicon-on-Insulator (sSOI) Using Wafer Bonding and Layer Transfer

M. Reiche, I. Radu, C. Himcinschi, R. Singh, S. Christiansen

Electrochemical Society
11 Conference Proceedings Silicon-on-insulator-multilayer structure fabricated by epitaxial layer tranfer

Liu, W., Xie, X., bin, Q., Zhang, Z., Lin, C.

Electrochemical Society
6 Conference Proceedings Relaxation mechanism of SiGe thin film on SOI substrate

Di, Z., Zhang, M., Liu, W., Zhu, M., Lin, C., Chu, P. K.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Integrated tool for fabrication of electronic components by laser direct write (Invited Paper)

Mathews, S.A., Zhang, C., Kegrese, T., Liu, D.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12