Blank Cover Image

Improve the charge stability of SiO2 films by plasma treatment and ion implantation

Author(s):
  • Yuan, N. ( Jiangsu Polytechnic Univ. (China) )
  • Li, J. ( Jiangsu Polytechnic Univ. (China) )
Publication title:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5774
Pub. Year:
2004
Page(from):
78
Page(to):
81
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
Language:
English
Call no.:
P63600/5774
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Visible Photoluminescence from Si Ion-Implanted and Thermally-Annealed SiO2 Films

Kanemitsu, Y., Shimizu, N., Okamoto, S., Komoda, T., Hemment, P. L. F., Seaiy, B. J.

MRS - Materials Research Society
7 Conference Proceedings Improve the P-Type Conductivity of SnO Films by Na Ion Implantation

T.Y. Yang, J. Zhao, X.L. Li, X.Y. Gao, C.F. Xue

Trans Tech Publications
2 Conference Proceedings Formation mechanism of the V02 polycrystalline film prepared by modified ion-beam-enhanced deposition

Li, J., Yuan, N.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Annealing behavior of vanadium oxide films prepared by modified ion-beam-enhanced deposition

Li, J., Yuan, N., Xie, J.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings ION-IMPLANTATION EFFECTS ON SPIN-ON-GLASS (SOL-GEL) SiO2 FILMS

Shacham-Diamand, Y., Moriya, N., Kalish, R.

Materials Research Society
9 Conference Proceedings Photoluminescence of Ge Nanoclusters in Ion Implanted SiO2

Lopes, J.M.J., Zawislak, F.C., Behar, M., Fichtner, P.F.P., Rebohle, L., Skorupa, W.

Materials Research Society
4 Conference Proceedings NAN0-STRUCTURE Ge FORMED IN THIN FILM SiO2 USING ION IMPLANTATION

Phillips, J. R., Hellman, Olof C., Kobayashi, N., Makita, Yunosuke, Shibata, Hajime, Yamada, A., Fons, P., Tsai, Yushin, …

MRS - Materials Research Society
10 Conference Proceedings SEMICONDUCTOR NANOCRYSTALS FORMED IN SiO2 BY ION IMPLANTATION

Zhu, Jane G., White, C. W., Budai, J. D., Withrow, S. P., Chen, Y.

MRS - Materials Research Society
5 Conference Proceedings Phase transition characteristics of tungsten and tantalum doped VO2 polycrystalline thin films formed by ion beam enhanced deposition

J. Li, D. Dan, N. Yuan, T. Xie

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings IMPLANTATION INDUCED CHARGE TRAPPING AND INTERFACE STATES GENERATION IN Si-SiO2 SYSTEM

Wong, H., Cheung, N.W.

Materials Research Society
6 Conference Proceedings SURFACE STABILITY AND FLOW CHARACTERISTICS OF BPSG FILM BY N2O PLASMA TREATMENT

Kim, C.G., Lee, H.S., Ahn, Y.C., Chung, U.I., Lee, J.K., Lee, J.G.

Materials Research Society
12 Conference Proceedings Ion implantation into Si covered by HfO2 or SiO2 film

Shi, H., Yu, M., Huang, R., Zhang, X., Wang, Y.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12