Nondestructive characterization of micromachined ceramics

Nondestructive characterization of micromachined ceramics

Author(s):

Cooney, A. ( Air Force Research Lab. (USA) )

Hix, K. E. ( Mound Laser & Photonics Ctr. , Inc. (USA) )

Yaney, P. ( Univ. of Dayton(USA) )

Zhan, Q. ( Univ. of Dayton(USA) )

Dosser, L. R. ( Mound Laser & Photonics Ctr. , Inc. (USA) )

Blackshire, J. L. ( Air Force Research Lab. (USA) )

1 more

Publication title:

Testing, Reliability, and Application of Micro- and Nano-Material Systems III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5766

Pub. Year:

2005

Page(from):

141

Page(to):

149

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457479 [0819457477]

Language:

English

Call no.:

P63600/5766

Type:

Conference Proceedings

Details

TDL ID:	ZA00014994
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Design and process integration for microelectronic manufacturing
Conf. info. (Number):	2005 : 3rd
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2005.03.08-2005.03.10

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