X-ray microscopy for NDE of micro- and nano-structrues(Invited Paper)

X-ray microscopy for NDE of micro- and nano-structrues(Invited Paper)

Author(s):

Wang, S. ( Xradia, Inc. (USA) )
Duewer, F. ( Xradia, Inc. (USA) )
Feser, M. ( Xradia, Inc. (USA) )
Scott, D. ( Xradia, Inc. (USA) )
Yun, W. ( Xradia, Inc. (USA) )

Publication title:

Testing, Reliability, and Application of Micro- and Nano-Material Systems III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5766

Pub. Year:

2005

Page(from):

40

Page(to):

48

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457479 [0819457477]

Language:

English

Call no.:

P63600/5766

Type:

Conference Proceedings

Details

TDL ID:	ZA00014994
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Design and process integration for microelectronic manufacturing
Conf. info. (Number):	2005 : 3rd
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2005.03.08-2005.03.10

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