Hierarchical MEMS synthesis and optimization

Hierarchical MEMS synthesis and optimization

Author(s):

Zhang, Y. ( Univ. of California/Berkeley(USA) )
Kamalian, R. ( Univ. of California/Berkeley(USA) )
Agogino, A. M. ( Univ. of California/Berkeley(USA) )
Sequin, C. H. ( Univ. of California/Berkeley(USA) )

Publication title:

Smart structures and materials 2005 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 7-10 March 2005, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5763

Pub. Year:

2005

Page(from):

96

Page(to):

106

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457448 [0819457442]

Language:

English

Call no.:

P63600/5763

Type:

Conference Proceedings

Details

TDL ID:	ZA00014990
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures and Materials
Conf. info. (Number):	2005
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2005.03.07-2005.03.10

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