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The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures

Author(s):
In, H. J. ( Massachusetts Institute of Technology(USA) )
Arora, W. J. ( Massachusetts Institute of Technology(USA) )
Stellman, P. ( Massachusetts Institute of Technology(USA) )
Kumar, S. ( Massachusetts Institute of Technology(USA) )
Yang, S. -H. ( Massachusetts Institute of Technology(USA) )
Smith, H. I. ( Massachusetts Institute of Technology(USA) )
Barbastathis, G. ( Massachusetts Institute of Technology(USA) )
2 more
Publication title:
Smart structures and materials 2005 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 7-10 March 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5763
Pub. date:
2005
Page(from):
84
Page(to):
95
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457448 [0819457442]
Language:
English
Call no.:
P63600/5763
Type:
Conference Proceedings

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