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Post-CMOS chip-level processing for high-aspect-ratio microprobe fabrication utilizing pulse plating

Author(s):
Publication title:
Smart structures and materials 2005 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 7-10 March 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5763
Pub. Year:
2005
Page(from):
1
Page(to):
10
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457448 [0819457442]
Language:
English
Call no.:
P63600/5763
Type:
Conference Proceedings

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