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Lithography simulation system for total CD control from design to manufacturing

Author(s):
Kotani, T. ( Toshiba Corp. (Japan) )
Ichikawa, H. ( Toshiba Microelectronics Co. (Japan) )
Kobayashi, S. ( Toshiba Corp. (Japan) )
Nojima, S. ( Toshiba Corp. (Japan) )
Izuha, K. ( Toshiba Corp. (Japan) )
Tanaka, S. ( Toshiba Corp. (Japan) )
Inoue, S. ( Toshiba Corp. (Japan) )
2 more
Publication title:
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5756
Pub. date:
2005
Page(from):
219
Page(to):
229
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457363 [0819457361]
Language:
English
Call no.:
P63600/5756
Type:
Conference Proceedings

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