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Introduction of a die-to-database verification tool for the entire printed geometry of a die: geometry verification system NGR2100 for DFM

Author(s):
Kitamura, T. ( NanoGeometry Research Inc. (Japan) )
Kubota, K. ( NanoGeometry Research Inc. (Japan) )
Hasebe, T. ( NanoGeometry Research Inc. (Japan) )
Sakai, F. ( NanoGeometry Research Inc. (Japan) )
Nakazawa, S. ( NanoGeometry Research Inc. (Japan) )
Vohra, N. ( NanoGeometry Research Inc. (Japan) )
Yamamoto, M. ( NanoGeometry Research Inc. (Japan) )
Inoue, M. ( Topcon Corp. (Japan) )
3 more
Publication title:
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5756
Pub. Year:
2005
Page(from):
73
Page(to):
84
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457363 [0819457361]
Language:
English
Call no.:
P63600/5756
Type:
Conference Proceedings

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