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Design process optimization, virtual prototyping of manufacturing, and foundry-portable DFM(Invited Paper)

Author(s):
Hogan, J. ( Telos Venture Partners(USA) )
Progler, C. ( Photronics, Inc. (USA) )
Chatila, A. ( Cypress Semiconductor Corp. (USA) )
Bruggeman, B. ( Cypress Semiconductor Corp. (USA) )
Heins, M. ( HPL Technologies, Inc. (USA) )
Pack, R. ( HPL Technologies, Inc. (USA) )
Boksha, V. ( HPL Technologies, Inc. (USA) )
2 more
Publication title:
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5756
Pub. date:
2005
Page(from):
21
Page(to):
38
Pages:
18
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457363 [0819457361]
Language:
English
Call no.:
P63600/5756
Type:
Conference Proceedings

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