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Real-time control of photoresist development process

Author(s):
  • Tay, A. ( National Univ. of Singapore(Singapore) )
  • Ho, W. -K. ( National Univ. of Singapore(Singapore) )
  • Kiew, C. -M. ( National Univ. of Singapore(Singapore) )
  • Zhou, Y. ( Institute of Chemical and Engineering Sciences(Singapore) )
  • Lee, J. H. ( Georgia Institute of Technology(USA) )
Publication title:
Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5755
Pub. date:
2005
Page(from):
244
Page(to):
250
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457356 [0819457353]
Language:
English
Call no.:
P63600/5755
Type:
Conference Proceedings

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