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An electrostatic analysis of subthreshold behavior in FINFET

Author(s):
  • Murugan, B. ( Univ. of Nevada/Las Vegas(USA) )
  • Venkat, R. ( Univ. of Nevada/Las Vegas(USA) )
  • Saha, S. ( Silicon Storage Technology, Inc. (USA) )
Publication title:
Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5755
Pub. date:
2005
Page(from):
157
Page(to):
165
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457356 [0819457353]
Language:
English
Call no.:
P63600/5755
Type:
Conference Proceedings

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