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The evaluation of aberration effects according to pattern shape and duly ratio

Author(s):
Lee, J.-E. ( Hanyang Univ. (South Korea) )
Park, S.-W. ( Hanyang Univ. (South Korea) )
Lee, C.-H. ( Hanyang Univ. (South Korea) )
Oh, H.-W. ( Hanyang Univ. (South Korea) )
Bae, S.-Y. ( Hanyang Univ. (South Korea) )
Oh, H.-K. ( Hanyang Univ. (South Korea) )
1 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
3
Page(from):
1738
Page(to):
1749
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

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