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Investigation of polarization effects on new mask materials

Author(s):
Itakura, Y. ( Komatsu Ltd. (Japan) )
Kawasa, Y. ( Komatsu Ltd. (Japan) )
Wakabayashi, O. ( Komatsu Ltd. (Japan) )
Moriya, M. ( Komatsu Ltd. (Japan) )
Nagai, S. ( Komatsu Ltd. (Japan) )
Sumitani, A. ( Komatsu Ltd. (Japan) )
Hagiwara, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Ishimaru, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Tsuji, S. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Fujii, K. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Wakamiya, W. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
6 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
1
Page(from):
587
Page(to):
598
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

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