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Modeling of electromagnetic effects from mask topography at full-chip scale

Author(s):
Borjon, A. ( Philips Semiconductors (France) )
Belledent, J. ( Philips Semiconductors (France) )
Shang, S. D. ( Mentor Graphics Corp. (USA) )
Toublan, O. ( Mentor Graphics Corp. (USA) )
Miramond, C. ( STMicroelectronics (France) )
Patterson, K. ( Freescale Semiconductor (France) )
Lucas, K. ( Freescale Semiconductor (France) )
Couderc, C. ( Philips Semiconductors (France) )
Rody, Y. ( Philips Semiconductors (France) )
Sundermann, F. ( STMicroelectronics (France) )
Urbani, J.-C. ( STMicroelectronics (France) )
Baron, S. ( STMicroelectronics (France) )
Trouiller, Y. ( LETI-CEA (France) )
Schiavone, P. ( LETI-CEA (France) )
9 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
1
Page(from):
498
Page(to):
505
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

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