25 nm immersion lithography at 193 nm wavelength
- Author(s):
Choi, S.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Park, T.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Kim, E. ( Samsung Electronics Co., Ltd. (South Korea) ) Youn, H.-J. ( Samsung Electronics Co., Ltd. (South Korea) ) Lee, D.-Y. ( Samsung Electronics Co., Ltd. (South Korea) ) Ban, Y.-C. ( Samsung Electronics Co., Ltd. (South Korea) ) Je, A.-Y. ( Samsung Electronics Co., Ltd. (South Korea) ) Kim, D.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Hong, J.-S. ( Samsung Electronics Co., Ltd. (South Korea) ) Kim, Y.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Yoo, M.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Kong, J.-T. ( Samsung Electronics Co., Ltd. (South Korea) ) - Publication title:
- Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5754
- Pub. Year:
- 2005
- Pt.:
- 1
- Page(from):
- 141
- Page(to):
- 147
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457349 [0819457345]
- Language:
- English
- Call no.:
- P63600/5754
- Type:
- Conference Proceedings
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