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How to describe polarization influence on imaging (Invited Paper)

Author(s):
  • Smith, B. W. ( Rochester Instifute of Technology (USA) and Amphibian Systems (USA) )
  • Bourov, A. ( Rochester Instifute of Technology (USA) and Amphibian Systems (USA) )
  • Fan, Y. ( Rochester Instifute of Technology (USA) and Amphibian Systems (USA) )
  • Cropanese, F. ( Rochester Instifute of Technology (USA) and Amphibian Systems (USA) )
  • Hammond, P. ( Rochester Instifute of Technology (USA) and Amphibian Systems (USA) )
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
1
Page(from):
23
Page(to):
37
Pages:
15
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

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