Hybrid BARC approaches for FEOL and BEOL intergration

Author(s):

Nakano, A. ( Osaka Univ. (Japan) )

Okamoto, K. ( Osaka Univ. (Japan) )

Yamamoto, Y. ( Osaka Univ. (Japan) )

Kozawa, T. ( Osaka Univ. (Japan) )

Tagawa, S. ( Osaka Univ. (Japan) )

Kai, T. ( JSR Corp. (Japan) )

Nemoto, H. ( JSR Corp. (Japan) )

Shimokawa, T. ( JSR Corp. (Japan) )

3 more

Publication title:

Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5753(1)

Pub. Year:

2005

Pt.:

1

Page(from):

436

Page(to):

448

Pages:

13

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457332 [0819457337]

Language:

English

Call no.:

P63600/5753-1

Type:

Conference Proceedings