Electron beam direct write process development for sub 45nm CMOS manufacturing
- Author(s):
Zhang, P. ( Air Products and Chemicals, Inc. (USA) ) Jaramillo, M. Jr. ( Air Products and Chemicals, Inc. (USA) ) Rao, M. B. ( Air Products and Chemicals, Inc. (USA) ) Ross, B. ( Air Products and Chemicals, Inc. (USA) ) Horvath, B. ( Air Products and Chemicals, Inc. (USA) ) Wong, P. ( ASML (Netherlands) ) Gehoel, W. ( ASML (Netherlands) ) Sinkwitz, S. ( ASML (Netherlands) ) - Publication title:
- Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5753(1)
- Pub. Year:
- 2005
- Pt.:
- 1
- Page(from):
- 408
- Page(to):
- 416
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457332 [0819457337]
- Language:
- English
- Call no.:
- P63600/5753-1
- Type:
- Conference Proceedings
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