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Novel chemical shrinkage material for small contact hole and small space patterning

Author(s):
Whittaker, A. K. ( The Univ. of Queensland (Australia) )
Blakey, I. ( The Univ. of Queensland (Australia) )
Liu, H. ( The Univ. of Queensland (Australia) )
Hill, D. J. T. ( The Univ. of Queensland (Australia) )
George, G. A. ( Queensland Univ. of Technology (Australia) )
Conley, W. ( SEMATECH, Inc. (USA) )
Zimmerman, P. ( SEMATECH, Inc. (USA) )
2 more
Publication title:
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5753(1)
Pub. Year:
2005
Pt.:
1
Page(from):
214
Page(to):
221
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457332 [0819457337]
Language:
English
Call no.:
P63600/5753-1
Type:
Conference Proceedings

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