Novel chemical shrinkage material for small contact hole and small space patterning
- Author(s):
Whittaker, A. K. ( The Univ. of Queensland (Australia) ) Blakey, I. ( The Univ. of Queensland (Australia) ) Liu, H. ( The Univ. of Queensland (Australia) ) Hill, D. J. T. ( The Univ. of Queensland (Australia) ) George, G. A. ( Queensland Univ. of Technology (Australia) ) Conley, W. ( SEMATECH, Inc. (USA) ) Zimmerman, P. ( SEMATECH, Inc. (USA) ) - Publication title:
- Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5753(1)
- Pub. Year:
- 2005
- Pt.:
- 1
- Page(from):
- 214
- Page(to):
- 221
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457332 [0819457337]
- Language:
- English
- Call no.:
- P63600/5753-1
- Type:
- Conference Proceedings
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