Blank Cover Image

Scatterometry based 65nm node CDU analysis and prediction using novel reticle measurement technique

Publication title:
Metrology, Inspection, and Process Control for Microlithography XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5752
Pub. Year:
2005
Page(from):
1312
Page(to):
1322
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457325 [0819457329]
Language:
English
Call no.:
P63600/5752-3
Type:
Conference Proceedings

Similar Items:

Janssen, M., van Ingen Schenau, K., van der Laan, H.

SPIE - The International Society of Optical Engineering

Word, J., Belledent, J., Trouiller, Y., Granik, Y., Toublan, O., Maurer, W.

SPIE - The International Society of Optical Engineering

I. Pundaleva, R. Chalykh, J. Lee, S. Choi, W. Han

SPIE - The International Society of Optical Engineering

T. -Y. Kang, C. -H. Chen, C. -H. Ho, L. Hsu, Y. -C. Ku, K. Nakamura, H. Moribe, T. Bashomatsu, K. Matsumura, K. Hatta, …

SPIE - The International Society of Optical Engineering

Sendelbach, M., Archie, C.N., Banke, B., Mayer, J., Nii, H., Herrera, P., Hankinson, M.

SPIE - The International Society of Optical Engineering

Kim, W. D., Eickhoff, M. D., Kim, D., McCurley, S.

SPIE - The International Society of Optical Engineering

Tokihisa Kaneguchi, Atsushi Someya, Hiroichi Kawahira

SPIE - The International Society of Optical Engineering

Conley, W., Broeke, D.J.V.D., Socha, R.J., Wu, W., Litt, L.C., Lucas, K., Nelson-Thomas, C.M., Roman, B.J., Chen, F., …

SPIE-The International Society for Optical Engineering

Lucas, K., Patterson, K., Boone, R., Miramond, C., Borjon, A., Belledent, J., Toublan, O., Entradas, J., Trouiller, Y.

SPIE - The International Society of Optical Engineering

Smith, M. D., Byers, J. D., Mack, C. A.

SPIE - The International Society of Optical Engineering

Yoshikawa, R., Tanizaki, H., Watanabe, T., Inoue, H., Ogawa, R., Endo, S., Ikeda, M., Takahashi, Y., Watanabe, H.

SPIE - The International Society of Optical Engineering

Schlueter, G. W. B., Nakamura, T., Matsumoto, J., Seyama, M., Whittey, J. M.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12