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Novel inspection technology for half pitch 55 nm and below

Author(s):
  • Kinoshita, A. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
  • Kitamura, F. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
  • Horie, M. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
  • Yoshida, T. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
Publication title:
Metrology, Inspection, and Process Control for Microlithography XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5752
Pub. Year:
2005
Page(from):
174
Page(to):
182
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457325 [0819457329]
Language:
English
Call no.:
P63600/5752-1
Type:
Conference Proceedings

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