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Performance study of CD mark size for angular scatterometry

Author(s):
Kang, H. C. ( Somsung Electronics Co., Lfd. (South Korea) )
Lim, J. T. ( Somsung Electronics Co., Lfd. (South Korea) )
Choi, J. S. ( Somsung Electronics Co., Lfd. (South Korea) )
Lee, T. Y. ( Somsung Electronics Co., Lfd. (South Korea) )
Lee, B. H. ( Somsung Electronics Co., Lfd. (South Korea) )
Chin, S. B. ( Somsung Electronics Co., Lfd. (South Korea) )
Cho, D. H. ( Somsung Electronics Co., Lfd. (South Korea) )
2 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5752
Pub. Year:
2005
Page(from):
59
Page(to):
66
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457325 [0819457329]
Language:
English
Call no.:
P63600/5752-1
Type:
Conference Proceedings

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