Pattern fidelity in nanoimprinted films using CD-SAXS

Pattern fidelity in nanoimprinted films using CD-SAXS

Author(s):

Gehoski, K. A. ( Motorola (USA) )

Resnick, D. J. ( Motorola (USA) )

Dauksher, W. J. ( Motorola (USA) )

Nordquist, K. J. ( Motorola (USA) )

Ainley, E. ( Motorola (USA) )

McCord, M. ( KLA-Tencor (USA) )

Raphaelian, M. ( KLA-Tencor (USA) )

Hess, H. ( KLA-Tencor (USA) )

3 more

Publication title:

Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5751

Pub. Year:

2005

Page(from):

415

Page(to):

422

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457318 [0819457310]

Language:

English

Call no.:

P63600/5751-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00014972
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Emerging lithographic technologies
Conf. info. (Number):	2005 : 9th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.03.01-2005.03.03

Similar Items:

1 Conference Proceedings Template fabrication for sub-80-nm contact hole patterning using step and flash imprint lithography Mancini, D.P., Gehoski, K.A., Dauksher, W.J., Nordquist, K.J., Resnick, D.J., Schumaker, P., McMackin, I. SPIE - The International Society of Optical Engineering	7 Conference Proceedings An electrical defectivity characterization of wafers imprinted with step and flash imprint lithography W. J. Dauksher, N. V. Le, K. A. Gehoski, E. S. Ainley, K. J. Nordquist, N. Joshi SPIE - The International Society of Optical Engineering
2 Conference Proceedings Sub-80-nm contact hole patterning using Step and Flash Imprint Lithography Mancini, D.P., Le, N., Gehoski, K.A., Young, S., Dauksher, W.J., Nordquist, K.J., Resnick, D.J. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Imprint technology: a potential low-cost solution for sub-45 nm device applications [6151-93] Le, N. V., Dauksher, W. J., Gehoski, K. A., Nordquist, K. J., Ainley, E., Mangat, P. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Evaluation of FIB and e-beam repairs for implementation on step and flash imprint lithography templates [6151-50] Young, S. R., Dauksher, W. J., Nordquist, K. J., Ainley, E. S., Gehoski, K. A., Graupera, A. A., Moriarty, M. H. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Critical dimension and image placement issues for step and flash imprint lithography templates Nordquist, K.J., Mancini, D.P., Dauksher, W.J., Ainley, E.S., Gehoski, K.A., Resnick, D.J., Masnyj, Z.S., Mangat, P.J.S. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Direct die-to-database electron-beam inspection of fused silica imprint templates [6349-86] Tsuneoka, M., Hasebe, T., Tokumoto, T., Yan, C., Yamamoto, M., Resnick, D. J., Thompson, E., Wakamori, H., lnoue, M., … SPIE - The International Society of Optical Engineering	10 Conference Proceedings Defect inspection for imprint lithography using a die to database electron beam verification system [6151-22] Myron, L. J, Thompson, McMackin, I., Resnick, D. J., Kitamura, T., Hasebe, T, Nakazawa, S, Tokumoto, T., Ainley, E., … SPIE - The International Society of Optical Engineering
5 Conference Proceedings Development of two new positive DUV photoresists for use with direct-write e-beam lithography Mancini,D.P., Resnick,D.J., Nordquist,K.J., Dauksher,W.J., Thackeray,J.W., McCord,M.A. SPIE-The International Society for Optical Engineering	11 Conference Proceedings High-resolution templates for step and flash imprint lithography Resnick, D.J., Dauksher, W.J., Mancini, D.P., Nordquist, K.J., Ainley, E.S., Gehoski, K.A., Baker, J.H., Bailey, T.C., … SPIE-The International Society for Optical Engineering
6 Conference Proceedings New methods for fabricating step and flash imprint lithography templates Resnick, D.J., Bailey, T.C., Mancini, D.P., Nordquist, K.J., Dauksher, W.J., Ainley, E.S., Talin, A., Gehoski, K.A., … SPIE-The International Society for Optical Engineering	12 Conference Proceedings Inspection and repair issues for Step-and-Flash Imprint Lithography templates Nordquist, K. J., Dauksher, W. J., Mancini, D. P., Resnick, D. J., Hess, H. F., Pettibone, D. W., Adler, D., Bertsche, … SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12