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Arrayed microcolumns for high throughput lithography

Author(s):
Hayden, P. ( Univ. College Dublin (Ireland) )
Cummings, A. ( Univ. College Dublin (Ireland) )
Gaynor, L. ( Univ. College Dublin (Ireland) )
Murphy, N. ( Univ. College Dublin (Ireland) )
O'Sullivan, G. ( Univ. College Dublin (Ireland) )
Sheridan, P. ( Univ. College Dublin (Ireland) )
Sokell, E. ( Univ. College Dublin (Ireland) )
White, J. ( Univ. College Dublin (Ireland) )
Dunne, P. ( Univ. College Dublin (Ireland) )
4 more
Publication title:
Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5751
Pub. Year:
2005
Page(from):
340
Page(to):
348
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457318 [0819457310]
Language:
English
Call no.:
P63600/5751-1
Type:
Conference Proceedings

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