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Simulation and fabrication of amorphous silicon rib-type arrayed waveguide grating

Author(s):
Liu, W.-J. ( I-Shou Univ. (Taiwan) )
Cheng, Y.-H. ( I-Shou Univ. (Taiwan) )
Chen, S. ( I-Shou Univ. (Taiwan) )
Lai, I-T. ( I-Shou Univ. (Taiwan) )
Lai, Y.-C. ( National Chiao Tung Univ. (Taiwan) )
Weng, M.-H. ( National Nano Device Labs. (Taiwan) )
Shih, Y.-H. ( I-Shou Univ. (Taiwan) )
Lee, C.-D. ( I-Shou Univ. (Taiwan) )
3 more
Publication title:
Optical Components and Materials II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5723
Pub. Year:
2005
Page(from):
285
Page(to):
298
Pages:
14
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456977 [0819456977]
Language:
English
Call no.:
P63600/5723
Type:
Conference Proceedings

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