Performance of uncooled microcantilever thermal detectors (Invited Paper)

Performance of uncooled microcantilever thermal detectors (Invited Paper)

Author(s):

Datskos, P.G. ( Oak Ridge National Lab. (USA) and Univ. of Tennessee/Knoxville ( USA ) )
Rajic, S. ( Oak Ridge National Lab. (USA) and Univ. of Tennessee/Knoxville ( USA ) )
Lavrik, N.V. ( Oak Ridge National Lab. (USA) and Univ. of Tennessee/Knoxville ( USA ) )

Publication title:

MOEMS Display and Imaging Systems III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5721

Pub. Year:

2005

Page(from):

136

Page(to):

150

Pages:

15

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456953 [0819456950]

Language:

English

Call no.:

P63600/5721

Type:

Conference Proceedings

Details

TDL ID:	ZA00014938
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS Display and Imaging Systems
Conf. info. (Number):	2005 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.24-2005.04.25

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