Polyimide MEMS actuators for medical imaging (Invited Paper)

Polyimide MEMS actuators for medical imaging (Invited Paper)

Author(s):

Zara, J.M. ( George Washington Univ. (USA) )
Mills, P. ( George Washington Univ. (USA) )
Patterson, P. ( George Washington Univ. (USA) )

Publication title:

MOEMS Display and Imaging Systems III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5721

Pub. Year:

2005

Page(from):

93

Page(to):

103

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456953 [0819456950]

Language:

English

Call no.:

P63600/5721

Type:

Conference Proceedings

Details

TDL ID:	ZA00014938
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS Display and Imaging Systems
Conf. info. (Number):	2005 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.24-2005.04.25

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